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| The
combination with optical profiling and Scanning Probe Microscopy (SPM)
opens up new possibilities in quantitative surface analysis: |
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Optical
inspection of large sample areas with the ability to zoom in on
interesting structures with nanometer resolution
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Analysis
of micro or nanostructures
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Critical
dimension (CD) measurements
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Investigation
of etched structures and roughness of semiconductor surfaces
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Profile
analysis of coatings and thin films
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Measurements
of surfaces with low optical contrast
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Characterization
of fragile biological tissue as well as many other applications in
materials and surface research
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