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XE-HDD |
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XE-HDD was designed for the sole
purpose of Hard Disk media processing and analysis. It excels in obtaining
superior images of Hard Disk Drive samples. The high performance Z scanner, a
flexure guided scan system which is completely decoupled from the XY scanner, is
mounted on the XE-HDD head (Super-luminescence diode (SLD) AFM scanning head)
with a built-in precision linear encoder, making it possible for the tip to
maintain constant feedback conditions (force or distance) as it is moved over a
sample surface. In addition, with its superb closed-loop feedback of the
Z-servo, XE-HDD can trace steep walls of the trench edges without hitting or
sticking to the sample. XE-HDD's XY scanner also excels in performance with
virtually no out of plane motion, while its competitors suffer from the presence
of severe background curvatures. The high precision motorized XY stage with a
built-in linear encoder on each axis, make precision control and monitoring of
XY sample stage movement possible with excellent repeatability. Together with
the XE-Series' own acoustic enclosure, the advanced active vibration isolation
system of the XE-HDD provides ultimate performance by isolating the AFM
environment from harsh fab conditions. Park System's mission is to provide our
Hard Drive Disk industry's customers with advanced AFM products and solutions
that extend the critical innovations of the XE-Series to the industrial Hard
Drive Disk metrology. |
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Product datasheet XE-HDD |
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XE-PTR |
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XE-PTR Lab/Inline was designed
with a focused purpose in mind; absolute PTR metrological analysis. XE-PTR Lab
provides a complete AFM system for PTR analyses routinely performed in analysis
laboratories, while XE-PTR Inline provides a complete AFM system for automated
inline PTR measurements and analyses, consisting of pattern recognition
capabilities, off-axis optics for pattern recognition, pattern recognizable row
bar fixtures, automated PTR measurements and analyses specified by customers'
recipes, etc. With XE-series' exclusive ability to perform True Non-Contact AFM,
XE-PTR can successfully analyze the nano-scale PTR metrology without corrupting
it despite the PTR morphology's varying hardness/softness. The high performance
Z scanner, a flexure guided scan system which is completely decoupled from the
XY scanner, is mounted on the XE-PTR head (Super-luminescence diode (SLD) AFM
scanning head) with a built-in precision linear encoder, making it possible for
the tip to maintain constant feedback conditions (force or distance) as it is
moved over a sample surface. In addition, with XE-PTR's sub-nanometer resolution
and virtually no background curvature in the XY axis, the ever-decreasing PTR
scale can be precisely and accurately measured. The high precision motorized XY
stage with a built-in linear encoder on each axis makes precision control and
monitoring of XY sample stage movement possible with excellent repeatability.
All the parts and components of the XE-PTR Inline are class 1 clean room
compatible, and together with the XE-Series' own acoustic enclosure, the
advanced active vibration isolation system of the XE-PTR provides ultimate
performance by isolating the AFM environment from harsh fab conditions. PSIA's
mission is to provide our customers with advanced AFM products and solutions
that extend the critical innovations of the XE-Series to the
laboratorial/industrial PTR metrology. |
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XE-WAFER |
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Atomic Force Microscopy (AFM) is emerging as
an essential tool in semiconductor metrology. The innovative features and
unprecedented metrology performance quickly enabled the XE system to become the
AFM of record at many data storage companies. The same attributes are beneficial
to semiconductor customers as well. XE-200 and XE-300 are wafer based systems
designed both as AFM or AFM/Profiler to address product deficiencies of current
AFM and profilers on the market. |
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Product datasheet XE-WAFER |
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XE-3DM |
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Park Systems has
revolutionized the AFM with the introduction of the XE-3DM, the fully automated
AFM system designed for overhang profiles, sidewall imaging and critical angle
measurements. The unique design of the XE-3DM, made possible by the XE-series’
decoupled XY and Z scanning system, allows for characterization of undercut
surfaces as well as sample top surfaces. In using Park Systems’ True Non-Contact
mode, the XE-3DM can realize non-destructive imaging of soft photoresist
structures at the same scanning speed as any other XE-series platform. |
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Product datasheet XE-3DM |
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XE-LCD |
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The XE-LCD is a fully automated
in-line metrology system that automatically finds optimal feedback parameters
and scanning speeds for large flat panel display substrates up to 1100 x 1300
mm. Designed for use by operator-level fab personnel, the XE-LCD is class 1
clean room compatible, and includes XE Inline System Control with automatic
wafer alignment, automatic height profiling, and data acquisition. Our
innovative vision system and pattern recognition algorithm enable a fully
automatic operation of AFM measurements so that you can focus on critical
process issues. XE-LCD can be seamlessly incorporated into any existing or
future production line as our professional staffs fully understand and have
adopted the industry standards of production work flow and communication
protocol therein. The fully automated XE-LCD generates more accurate and better
data in a non-destructive manner without the need for sample preparation. |
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Product datasheet XE-LCD |
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