MeX is a stand alone software package that turns any SEM with digital imaging into a true surface metrology device. Using stereoscopic images the software automatically retrieves 3D information and presents a highly accurate, robust and dense 3D dataset which is then used to perform traceable metrology examination. The results are obtained irrespective of the SEM magnification providing metrology at macro and micro levels...

• Makes 3D measurements directly from SEM images

• Modular software for profile-, roughness-, area- and even volume analysis

• Fast, robust and accurate analysis is combined with very easy operation

• No additional hardware is necessary

• Runs on standard PCs with any common operating system

• Extensive export and printing capabilities

The software is self installing and is extremely easy to use. The modular design of the package allows flexibility in use; it also permits users, with a single repetitive task to perform, to purchase modules according to requirements. The analysis modules allow measurement of profile, roughness, area, volume and ìZî height. All measurements are traceable, can be calibrated and conform to ISO standards.

The performance of MeX has been proved by many customers in leading companies and universities throughout the world providing imaging and analysis previously unobtainable with SEM images.

• Profile and roughness

• Area

• Volume

Profile measurement enables virtual cutting of specimen. The user defines a path on the optical image and receives the corresponding 3D profile. Roughness and contour measurements conform to recognized EN ISO 4287/4288 international standards. The profile analysis also allows the fitting of primitives such as circles, angles or others. Further, manual and semi automatic measurement possibilities are provided.

Area analysis provides the determination of Ra, Rq and Rz. Parameters like roughness, waviness and the fractal dimension of user defined surface patches are achieved. The user defines a region of interest such as a rectangle or polygon and MeX automatically calculates the values. For the visual representation of the surface a grey scale or pseudo colored depth map can be used. It is also possible to display ISO-lines to highlight depth variations.