07 jun Hitachi High-Technologies releases new series of Field Emission Scanning Electron Microscopes

Krefeld | June 7, 2017

Hitachi High-Technologies announced the introduction of the new Regulus series of field emission scanning electron microscopes (FE-SEM). The Regulus series lineup comprises four models: the Regulus8100, developed as the successor to the SU8010, as well as the Regulus8220, Regulus8230, and Regulus8240.

With optimized electron optical systems, the new Regulus series features resolutions down to 0.9 nm in the Regulus8220/8230/8240 models and 1.1 nm in the Regulus8100 model. This is an improvement of roughly 20% in resolution at 1 kV landing voltage compared to previous models. The Regulus series employs a novel cold-field-emission (CFE) gun, optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times, which doubles the magnification ability compared to previous models.