|
|
|
Probe Beam
Analyzed Beam |
|
Sampling
Depth |
|
Detection
Limits |
|
Information
|
|
Spatial
Resolution |
|
Materials |
|
|
XPS |
AES |
DSIMS |
SSIMS |
|
Photons
Electrons |
Electrons
Electrons |
Ions
Ions |
Ions
Ions |
|
5-50 Å
|
5-50 Å |
5-10 Å |
5-10 Å |
|
1x10-4
|
1x10-3
|
1x10-8 |
1x10-6 |
|
Elemental
Chemical |
Elemental
Chemical |
Elemental
Structural |
Elemental
Molecular |
|
10 um |
150 Å |
500 Å |
120 nm |
|
All Solids |
Inorganics |
Inorganics |
All Solids |
|