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Last update 16-06-2007
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 SPM / AFM
 Optical profilers
 Stylus profilers
 Thin film metrology
 Mechanical testing
 Surface analysis
 Analyse software
 
Depending on the application like organic and inorganic materials and resolution different techniques of surface analysis are available. ST Instruments provides the techniques given in the techniques comparison chart.

By clicking on the technique a description is given.

 

Probe Beam
Analyzed Beam

Sampling
Depth

Detection
Limits

Information
 

Spatial
Resolution

Materials

 

 XPS

 AES

 DSIMS

SSIMS 

Photons
Electrons

Electrons
Electrons

Ions
Ions 

Ions
Ions 

5-50 Å
 

5-50 Å 

5-10 Å 

5-10 Å 

1x10-4
 

1x10-3 

 1x10-8

1x10-6

Elemental
Chemical

Elemental
Chemical

Elemental
Structural

Elemental
Molecular

10 um 

150 Å

500 Å

120 nm

All Solids

Inorganics

Inorganics

All Solids

 
XPS
AES
D-SIMS
TOF-SIMS
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