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The new PHI TRIFT V nanoTOF
surface analysis instrument is the next generation of PHI’s highly
successful line of TOF-SIMS instruments which utilize the patented TRIFT
analyzer. Several significant improvements have been introduced with the
nanoTOF. The superior performance TRIFT analyzer
has been combined with revolutionary new sample handling platform. This
innovative new sample handling platform was designed from the ground up
specifically for TOF-SIMS, adding the flexibility needed to accommodate
samples with complex geometries. In addition, improvements have been made in
charge compensation and ion gun performance.
Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
provides sub-micron elemental, chemical, and molecular characterization and
imaging of solid surfaces and thin films for products such as
semiconductors, hard disk drives, polymers, paint and other surface
coatings. Manufacturing companies in the chemical, semiconductor and
pharmaceutical industries can use the nanoTOF to
improve product performance, conduct failure analysis and manage process
control. Time-of-Flight SIMS surface analysis instruments differ from
Dynamic SIMS instruments in that they can analyze the outermost one or two
mono-layers of a sample while preserving molecular information. While D-SIMS
provides primarily elemental information, TOF-SIMS surface analysis yields
chemical and molecular information. TOF-SIMS is ideal for organic or
inorganic materials, and can be used to characterize both insulating and
conductive samples. With detection limits in the ppm to ppb range, shallow
depth profiling capabilities and automated analysis, the nanoTOF
can be used to analyze surface contamination, trace impurities, thin films,
and delamination failures. It is also a valuable tool to investigate
surface modification chemistry and catalyst surface composition. |