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X-ray Photoelectron Spectroscopy (XPS),
also known as Electron
Spectroscopy for Chemical Analysis
(ESCA), is the
most widely used surface analysis technique because of its relative simplicity
in use and data interpretation. The sample is irradiated with mono-energetic
x-rays causing photoelectrons to be emitted from the sample surface. An electron
energy analyzer determines the binding energy of the photoelectrons. From the
binding energy and intensity of a photoelectron peak, the elemental identity,
chemical state, and quantity of an element are determined. The information XPS
provides about surface layers or thin film structures is of value in many
industrial applications including: polymer surface modification, catalysis,
corrosion, adhesion, semiconductor and dielectric materials, electronics
packaging, magnetic media, and thin film coatings used in a number of
industries. Specific applications include: surface elemental and chemical
characterization, thin film (<1µm thick) characterization, surface cleanliness,
and surface migration of additives or impurities. |
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