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The surface analysis technologies are based
on the following products. |
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Quantera |
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The PHI Quantera Scanning x-ray
Microprobe provides unique micro area XPS capabilities and industry-leading
depth profiling capabilities in a completely automated and easy to use
instrument package. |
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PHI 5000 Versaprobe |
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The new PHI 5000 VersaProbe
is a multi-technique surface analysis instrument based on PHI's highly
successful scanning x-ray technology. |
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700 |
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The PHI 700
is a superior
performance Auger nanoprobe provides characterization of complex structures,
with spatial resolution of less than 60Å. |
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TriftV nanoTOF |
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The PHI TRIFT V
nanoTOF
is a next generation TOF SIMS analysis tool for sub-micron elemental, chemical and
molecular characterization of solid surfaces and thin films. The TRIFT V
nanoTOF
offers detection limits in the ppm to ppb range, shallow depth profiling
capabilities and automated analysis. |
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ADEPT-1010 |
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The PHI ADEPT-1010 is a
high-performance SIMS depth-profiling tool designed to meet the
analytical requirements of 0.18 um line width semiconductor implant technology. |
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