The PHI 700 Field Emission Scanning Auger Nanoprobe™  is a state-of-the-art, high performance Auger Electron Spectroscopy (AES) system that provides elemental and chemical state information of sample surfaces, submicron features, thin films and interfaces.  Ideally suited for the analytical lab, the 700 offers innovations that allow for the analysis of very rough sample surfaces and multilayered structures.

The 700’s Schottky field emission optics offer Auger spatial resolution of less than 8nm.  The result is rapid, high resolution secondary electron and Auger imaging of submicron features.  The coaxial geometry of the 700’s electron column and the Cylindrical Mirror Analyzer (CMA) enables rapid, accurate Auger analysis of all samples, including those with rough surfaces or complex geometries, as analytical shadowing is eliminated.

High performance Auger spectral analysis, SEM/Auger imaging, and depth profiles combine to provide complete characterization of complex samples such as:

• Semiconductor devices:  surface defects or particles, imbedded defects, contamination, thin films and failure analysis;
• Metals:  coatings, composites, grain boundary analysis (including in situ fracture), corrosion and other failures

The 700 features a five-axis, fully-motorized specimen stage controlled with PHI’s new SmartSoft user interface, which is now available with a Die Navigation module.  The stage and software combine to provide flexibility in sample handling and the ability to automatically analyze multiple features or samples.