In this PCSA configuration, the
orientation of the angles of P and C is chosen in
such a way that the elliptically polarized light is
completely linear polarized after it is reflected
off the sample. As shown in Figure3, the
ellipsometric null condition is obtained when A "crossesÓ
with respect to the polarization axis of the
relected light, i.e., the state at which the
absolute minimum of light flux is detected at the
CCD camera.
The angles of P, C, and A that obtained the null
condition are related to the optical properties of
the sample. Reduction of the measured data with
computerized optical modeling leads to a deduction
of film thickness and the complex refractive
indexes.
