The Single Wavelength EP³-SW is a powerful system to get started with Imaging Ellipsometry. Imaging allows you to have a direct view on the sample! You'll see a direct image of your sample from the CCD-camera. This image already exhibits ellipsometric contrast, which allows you to analyze qualitatively the homogeneity of your sample or to decide whether surface structures are as they should be.

Imaging Ellipsometry offers a lateral (spatial) resolution down to 1 micrometer.

The EP³-SE is the only commercially available Imaging Spectroscopic Ellipsometer and offers greater flexibility for measurements with Imaging Ellipsometry.

Multi– Channel and Imaging Surface Plasmon Resonance Analyser.

The SPEM is a combination of Imaging Ellipsometer based on Nanofilm’s EP³ and the scanning probe microscope. Take advantage of the convenience of imaging ellipsometry to visualize thin films and surface structures, and then zoom into nanometer details with Scanning Probe Microscopy on the same spot! Our SPEM integrates two full-featured instruments via intelligent sample handling, integrating complementary data from two independent methods without the need for laborious sample positioning.

The EP³-BAM is an ideal thin films imaging system. It is a completely "hands-off" computer-controlled system, using proprietary motor control circuitry. The EP³-BAM displays real-time image of your sample directly on the monitor and features important image processing functions. An "objective scanner" provides extended depth-of-field for overall-focused images.
The combination of a high power green laser and excellent objectives allows lateral resolutions of 1 micron, the current limit of CCD optical detectors.