When using scanning electron microscopes to obtain high-magnification images of nanometer-scale features, or to observe the outermost surfaces of samples at low accelerating voltages, one frequently finds that the fine surface structure gradually becomes unclear as the observation proceeds, while previously-observed sample regions turn black when the magnification is reduced. This phenomenon, known as contamination, is thought to be due to aggregation and polymerization of residual gaseous hydrocarbon molecules on or near the sample surface due to electron-beam irradiation; these molecules condense and adhere to the sample surface, where they absorb secondary electrons emitted by the sample.

ICON-key-features-greyKey Features and Benefits

♦   Safe, non-destructive UV cleaning technology

♦   Typical sample cleaning time, 5-15 minutes

♦   Programmable cleaning recipes


♦   Metals – Al, Cu, Au, Sn, Ag, Ni, Mo

♦   Semiconductors – Si, a-NPD (OLED hole transport layer), GaAs

♦   LiMnO4 – Cathodic materials for Li batteries

About Hitachi

Hitachi High-Technologies, created in 2001 and part of the worldwide conglomerate Hitachi Group, provides a wide variety of scientific instruments. Their innovative R&D approach enables them to provide world-class solutions in the fields of materials sciences, life sciences and semiconductor.

Why Hitachi?

♦   Key player in the market of Electron Microscopes

♦   Creative, leading-edge technology

♦   Complementary product range

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