NX-3DM

The NX-3DM is a completely automated industrial AFM system designed for overhang profiles, sidewall roughness and imaging, and critical angle measurements. Its unique sideway orientation allows you to access overhang and undercut structures of photoresist and other industrial materials. As its predecessors, the NX-3DM comes with the True Non-Contact mode –which reduces tip-sample damage – and the industry leading low noise Z-detector.

NX-3DM


ICON-key-features-greyKey Features and Benefits

♦   Fully automated industrial AFM with NX technology

♦   Innovative head design for overhang and undercut structures

♦   A reliable, seamless measurement tool for 3D materials

ICON-key-features-greyApplications

♦   CD measurement and sidewall characterization

♦   High throughput and non-destructive sidewall roughness measurement

♦   CD measurement of high aspect ratio trench

About Park Systems

Playing a critical role in the development of AFM technology, Park Systems has remained the leading innovator in nanoscale microscopy and metrology throughout its long history and continues to invest in the development of new emerging technologies. With headquarters in Korea, the US, Japan, Singapore and Europe, they create some of the world’s most accurate and most effective AFMs for research and industry.

Why Park Systems?

♦   World-recognized leader in the AFM industry

♦   Unmatched ease of use

♦   The most innovative AFM technology

Product icon oranjeRelated products

Automated Mapping Systems

Fully-automatic mapping of thickness and index for nearly any sample shape

Quantera-II-XPS-Scanning-Microprobe

Quantera II XPS Scanning Microprobe

High throughput XPS with the highest small area sensitivity

X-Tool-Automated-XPS-Scanning-Microprobe