The F3-sX family measures semiconductor and dielectric layers up to 3 mm thick. Such thick layers tend to be rougher and less uniform than thinner layers, which the F3-sX counters with a 10-µm-diameter measurement spot. With it the F3-sX family easily measures materials that are impossible to measure with other instruments.
♦ 10µm spot size
♦ Easiness of use
♦ Up to 3mm thick layers
♦ Si wafer thickness
♦ IC failure analysis
♦ Thick photoresist
Since 1995, Filmetrics has been providing thin-film measurement solutions that are both simple and affordable. The Filmetrics approach results in film-thickness measurements that takes less than a second, by operators who can be trained in minutes.
♦ Easy-to-use and cost efficient systems
♦ Solutions for any thin-film measurement
♦ Very fast measurements