Referenced Spectroscopic Ellipsometer

The Referenced Spectroscopic Ellipsometer is a special type of ellipsometer, which compares the sample to a reference. In this way, the ellipsometric difference between sample and reference can be measured. This new technique is used for analyzing films, layers and surfaces, including thickness measurement and mapping. The referenced spectroscopic ellipsometer combines the high sensitivity and layer thickness region of an Ellipsometer (0.1nm-10µm) with the highest available speed on the market.

Referenced Spectroscopic Ellipsometer


ICON-key-features-greyKey Features and Benefits

♦   Single-shot measurement with data rate of 100 spectra /  second

♦   Unique combination of high sensitivity and high speed

♦   No movement of optical components during measurements

ICON-key-features-greyApplications

♦   Wafer inspection

♦   Ultra thin films and interlayers

♦   Detection of contaminants

About Accurion

Accurion provides high-end and reliable state-of-the-art technology in two product lines: Imaging Ellipsometry and Active Vibration Isolation. Nanofilm has been the leader in Brewster Angle Microscopy and Imaging Ellipsometry since 1991. Halcyonics was founded in 1996 as specialist in Active Vibration Isolation. The existing product brands Nanofilm and Halcyonics are continued as product divisions of Accurion.

Why Accurion?

♦   Leading in Imaging Ellipsometry and BAM

♦   Solutions for any thin-film measurement

♦   Large range of active vibration isolation solutions

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