MiniLab 026 systems are ultra-compact floor-standing vacuum systems for metal, dielectric and/or organics thin-film deposition. The MiniLab 026 is also glovebox-compatible and is the only system in the MiniLab range that can be easily retrofitted to an existing glovebox setup. A turbomolecular pumping system is standard, for high-vacuum base pressures of better than 5 × 10-7 mbar. The system can be equipped with a wide variety of deposition techniques. Various combinations can be included in MiniLab 026 systems. For all techniques, deposition rate monitoring by QCM together with thin-film monitors and controllers are available.
Key Features and Benefits
♦ Modular design with numerous options and features
♦ Easily retrofitted to existing glovebox integration
♦ Up to 6” diameter substrates with heating, rotation and Z-shift
Techniques
♦ Magnetron Sputtering, E-Beam Evaporation, Thermal Evaporation and Low-Temperature Evaporation
♦ Metals, Dielectrics and organics deposition
♦ Automatic, manual, sequential and co-deposition
About Moorfield
Since 1989, Moorfield has specialized itself in vacuum deposition equipment (PVD/CVD) for pilot-scale industrial production and high-end educational institutions. Their system designs involve extensive modularity which results in flexible solutions. The product range, which consists of different functionalities, is sized for deposition of metals, inorganics and organics.
Why Moorfield?
♦ Excellence in vacuum technology since 1989
♦ Laboratory equipment to match your research
♦ needs
♦ Multiple platforms and infinite options
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