The ETHOS is a high-performance composite FIB-SEM system that can be used for a wide range of applications. A newly developed magnetic/electrostatic compound lens enables the ETHOS to perform state-of-the-art imaging performance resolving sub-nanometer features in high contrast for low-voltage SEM applications. The SEM column is fitted with three detectors to facilitate multiple contrast observation. The system also allows for high-grade TEM sample preparation.


ICON-key-features-greyKey Features and Benefits

♦  Enables multiple contrast observation

♦  Fast processing due to FIB with high current density

♦  High stability and precision


♦   Biology

♦   Materials science

♦   Semiconductors

About Hitachi

Hitachi High-Tech Corporation, provides a wide variety of scientific instruments. Their innovative R&D approach enables them to provide world-class solutions in the fields of materials sciences, life sciences, energy storage and semiconductor.

Why Hitachi?

♦   Key player in the market of Electron Microscopes

♦   Creative, leading-edge technology

♦   Complementary product range

Product icon oranjeRelated products


With multiple lens configurations and automated image stitching


With revolutionary computer-assisted EM Wizard technology

FlexSEM 1000II

Compact variable-pressure SEM with unparalleled image resolution