♦ Front door lifted by gas pressure mechanism
♦ Broadband damping of acoustic noise
♦ Standard sizes as well as customized versions available
♦ AE_200 – 352 × 352 × 415 mm
♦ AE_600 – 600 × 600 × 800 mm
♦ AE_900 – 950 × 750 × 940 mm
Accurion provides high-end and reliable state-of-the-art technology in two product lines: Imaging Ellipsometry and Active Vibration Isolation. Nanofilm has been the leader in Brewster Angle Microscopy and Imaging Ellipsometry since 1991. Halcyonics was founded in 1996 as specialist in Active Vibration Isolation. The existing product brands Nanofilm and Halcyonics are continued as product divisions of Accurion.
♦ Leading in Imaging Ellipsometry and BAM
♦ Solutions for any thin-film measurement
♦ Large range of active vibration isolation solutions
Non-invasive measurement of micro- and nanogeometries with multiple optical technologies
Compact variable-pressure SEM with unparalleled image resolution