Our chemical analysis instruments provide detailed chemical characterization reaching from atomic layers down to microns. These measurements provide a means to correlate performance with surfaces or thin film composition.
XPS
ELEMENTAL & CHEMICAL STATE INFORMATION
TOF-SIMS
ELEMENTAL, CHEMICAL & MOLECULAR STATE INFORMATION
♦ Quantes / Combines conventional XPS with HAXPES for extended depth of analysis
♦ VersaProbe III XPS Scanning Microprobe / Multi-technique XPS including PHI’s patented X-ray beam induced secondary electron imaging.
♦ Quantera II XPS Scanning Microprobe / High throughput automated XPS with the highest small area sensitivity
♦ X-Tool Automated XPS Scanning Microprobe / Push button automated XPS
♦ nanoTOF II TOF-SIMS / patented TRIFT mass spectrometer with superior sensitivity
Auger
ELEMENTAL STATE INFORMATION
Sub-micron IR spectroscopy
MOLECULAR & STRUCTURAL STATE INFORMATION
♦ 710 Scanning Auger Nanoprobe / High spatial resolution Auger imaging performance for the most demanding AES applications
RAMAN
MOLECULAR STATE INFORMATION
♦ RAMANforce / Renewed ultra-fast Raman imaging system with even higher spatial resolution near the diffraction limit
♦ RAMANdrive / Specialized Raman microscope for wafer analysis equipped with 300 mm stage
♦ RAMANview / New Raman imaging with a larger field of view, deeper depth of focus and a longer working distance