Chemical Analysis

Chemical analysis

Chemical Analysis

Our chemical analysis instruments provide detailed chemical characterization reaching from atomic layers down to microns. These measurements provide a means to correlate performance with surfaces or thin film composition.

XPS

ELEMENTAL & CHEMICAL STATE INFORMATION

TOF-SIMS

ELEMENTAL, CHEMICAL & MOLECULAR STATE INFORMATION

♦   Quantes | Combines conventional XPS with HAXPES for extended depth of analysis

♦   VersaProbe III XPS Scanning Microprobe | Multi-technique XPS including PHI’s patented X-ray beam induced secondary electron imaging.

♦   Quantera II XPS Scanning Microprobe | High throughput automated XPS with the highest small area sensitivity

♦   X-Tool Automated XPS Scanning Microprobe | Push button automated XPS

♦   nanoTOF II TOF-SIMS | patented TRIFT mass spectrometer with superior sensitivity

Auger

ELEMENTAL STATE INFORMATION

Sub-micron IR spectroscopy

MOLECULAR & STRUCTURAL STATE INFORMATION

♦  710 Scanning Auger Nanoprobe | High spatial resolution Auger imaging performance for the most demanding AES applications

♦   Vista-IR | Combines AFM with IR spectroscopy

♦   mIRage | Submicron IR spectroscopy and imaging

RAMAN

MOLECULAR STATE INFORMATION

♦   RAMANforce | Renewed ultra-fast Raman imaging system with even higher spatial resolution near the diffraction limit

♦   RAMANdrive | Specialized Raman microscope for wafer analysis equipped with 300 mm stage

♦   RAMANview | New Raman imaging with a larger field of view, deeper depth of focus and a longer working distance