Our chemical analysis instruments provide detailed chemical characterization reaching from atomic layers down to microns. These measurements provide a means to correlate performance with surfaces or thin film composition.
♦ Quantes / Combines conventional XPS with HAXPES for extended depth of analysis
♦ VersaProbe III XPS Scanning Microprobe / Multi-technique XPS including PHI’s patented X-ray beam induced secondary electron imaging.
♦ Quantera II XPS Scanning Microprobe / High throughput automated XPS with the highest small area sensitivity
♦ X-Tool Automated XPS Scanning Microprobe / Push button automated XPS
♦ RAMANforce / Renewed ultra-fast Raman imaging system with even higher spatial resolution near the diffraction limit
♦ RAMANdrive / Specialized Raman microscope for wafer analysis equipped with 300 mm stage
♦ RAMANview / New Raman imaging with a larger field of view, deeper depth of focus and a longer working distance