Thin Film Measurements

Very thin layers of material that are deposited on the surface of another material (thin films) are extremely important to many technology-based industries. Thin films are widely used, for example, to provide passivation, insulating layers between conductors, diffusion barriers, and hardness coatings for scratch and wear resistance. The fabrication of integrated circuits consists primarily of the deposition and selective removal of a series of thin films. This widespread use is explained by increased dependence on thin films in many areas and the flexibility to measure most material types.


Spectroscopic Ellipsometry


Horiba Scientific

♦  non-contact, non-destructive technique to characterize thin films or surfaces
♦  multi-layers measurement