The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few Angstroms to 20µm, optical constants (n,k), and thin film structure properties (such as roughness, optical graded and anisotropic layers, etc).
The spectral range from 450 to 1000nm is measured in a few seconds and ellipsometric data are analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to fulfil both routine analysis with predefined recipes and advanced analysis with state-of-the art ellipsometric modelling.
The Smart SE ellipsometer is a cost effective thin film R&D tool with no compromise on features, and delivers research grade performance at an economical price. It provides an integrated vision system for accurate spot positioning, seven automated micro spots with size ranging down to a few tens of microns for measurement of small features, and the ability to measure the complete 16-element Mueller matrix in just a few seconds for the study of complex samples.
The flexible design of the Smart SE enables full automation of the sample stage and goniometer as well as in-situ use on process chambers. It matches any application or budget for a wide variety of application areas including microelectronic, photovoltaic, display, optical coatings, surface treatments and organic compounds.
♦ Thin film analysis made easy with automatic routines
♦ Highly featured system
♦ Sample vision
♦ Flat panel displays
♦ Photovoltaics Devices
HORIBA Scientific offers 200 years of experience in developing high-performance scientific instruments and analytical solutions. It’s a world-leading supplier providing researchers superior products and solutions, supported by a global network of service and application support.
♦ Worldwide leader in analytical solutions
♦ 200 years of experience in R&D
♦ Research driven, leading-edge technology♦
♦ Complementary product range♦