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UVISEL Plus In-Situ

[/vc_column_text][vc_column_text]The UVISEL Plus in-situ spectroscopic ellipsometer can be easily mounted on process chambers (PECVD, MOCVD, sputter, evaporation, ALD, MBE) for the real-time control of thin film deposition or etch processes.

The UVISEL Plus in-situ provides the unique combinations of very high speed, sensitivity, dynamic range and accuracy making the instrument able to control deposition / etch at the atomic layer thickness level, even for rapid processes.

Using our new adaptation kit it is possible to use the same ellipsometer for in-situ and benchtop application on a goniometer. Switching between the two configurations and aligning the system is extremely straightforward.

The UVISEL Plus in-situ ellipsometer is driven by the DeltaPsi2 software platform that is common to all HORIBA Jobin Yvon thin film metrology tools. The software provides real-time data acquisition and modelling / reprocessing capabilities. Advanced communication protocols including TCP/IP and RS232 have been designed for production environments and OEM needs.[/vc_column_text][/vc_column][vc_column width=”1/2″][vc_single_image image=”18705″ img_size=”medium” alignment=”center” qode_css_animation=””][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” css=”.vc_custom_1668163924362{padding-top: 20px !important;padding-bottom: 20px !important;}” z_index=””][vc_column width=”1/6″][button size=”large” style=”white” target=”_blank” hover_type=”default” font_weight=”500″ text_align=”center” text=”Contact us” background_color=”#707070″ border_radius=”6″ link=”https://www.stinstruments.com/contact/”][/vc_column][vc_column width=”1/6″ css=”.vc_custom_1451291568569{margin-right: 15px !important;}”][button size=”large” style=”white” target=”_self” hover_type=”default” font_weight=”500″ text_align=”center” text=”Request a brochure” background_color=”#eb6209″ border_radius=”6″ link=”https://www.stinstruments.com/thin-film-measurements/spectroscopic-ellipsometry/uvisel-plus-in-situ/request-brochure-uvisel-plus-in-situ/”][/vc_column][vc_column width=”1/6″][/vc_column][vc_column width=”1/6″][vc_column_text][/vc_column_text][/vc_column][vc_column width=”1/6″][/vc_column][vc_column width=”1/6″][vc_column_text]
[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern”][vc_column width=”1/2″][vc_column_text css=”.vc_custom_1451314367818{padding-top: 30px !important;padding-right: 30px !important;padding-bottom: 20px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]

Key Features and Benefits

[/vc_column_text][vc_column_text css=”.vc_custom_1662030065317{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Highest speed and accuracy[/vc_column_text][vc_column_text css=”.vc_custom_1662030074853{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Fully integrated software package for real-time measurement, modelling and reporting[/vc_column_text][vc_column_text css=”.vc_custom_1662030103901{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 30px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Easy switch between in-situ and ex-situ configurations[/vc_column_text][/vc_column][vc_column width=”1/2″][vc_column_text css=”.vc_custom_1451314569972{padding-top: 30px !important;padding-right: 30px !important;padding-bottom: 20px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]

Applications

[/vc_column_text][vc_column_text css=”.vc_custom_1662030161366{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Thin film thickness[/vc_column_text][vc_column_text css=”.vc_custom_1662030193166{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Optical constants (n,k)[/vc_column_text][vc_column_text css=”.vc_custom_1662030221462{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 30px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Material composition[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” el_class=”pg-sec-content-bd heading-cus-sec” z_index=””][vc_column width=”3/6″][vc_column_text]

About HORIBA Scientific

[/vc_column_text][vc_column_text]HORIBA Scientific offers 200 years of experience in developing high-performance scientific instruments and analytical solutions. It’s a world-leading supplier providing researchers superior products and solutions, supported by a global network of service and application support.[/vc_column_text][/vc_column][vc_column width=”1/6″][vc_column_text]

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Why Horiba Scientific?

[/vc_column_text][vc_column_text css=”.vc_custom_1657807407223{padding-top: 10px !important;}”]♦   Worldwide leader in analytical solutions

♦   200 years of experience in R&D

♦   Research driven, leading-edge technology♦

♦   Complementary product range♦[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” el_class=”cus-rel-prod-title” z_index=””][vc_column][vc_column_text]

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