The Hitachi HF5000 is a unique 200 kV aberration-corrected TEM/STEM: the perfect harmony of imaging resolution and analytical performance.


0.078 nm spatial resolution in STEM is achieved together with high specimen-tilt capability and large solid angle EDX detector(s), all in a single objective lens configuration.


The HF5000 builds on features from Hitachi HD-2700 dedicated STEM including Hitachi’s own fully automated aberration corrector, symmetrical dual SDD EDX and Cs-corrected SE imaging. It also incorporates the advanced TEM/STEM technologies developed in the HF series. Integrating these accumulated technologies into a new 200 kV TEM/STEM platform results in an instrument with an optimum combination of sub-Å imaging and analysis, as well as the flexibility and unique capabilities to address the most advanced studies.

ICON-key-features-greyKey Features and Benefits

♦   Fully automated probe-forming spherical aberration corrector

♦   High-brightness and high-stability cold FE electron gun (Cold FEG)

♦   Ultra-stable column and power supplies for enhanced instrument



♦   Biomedicine

♦   Life science

♦   Nano materials


About Hitachi

Hitachi High-Tech Corporation, provides a wide variety of scientific instruments. Their innovative R&D approach enables them to provide world-class solutions in the fields of materials sciences, life sciences, energy storage and semiconductor.

Why Hitachi?

♦   Key player in the market of Electron Microscopes

♦   Creative, leading-edge technology

♦   Complementary product range

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