Theia

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THEIA – R&D scale wafer coating

[/vc_column_text][vc_column_text]The Forge Nano Theia system is the only R&D tool for ALD that delivers ultra fast deposition, compatible with large-scale production. THEIA delivers ultra fast deposition with Forge Nano’s patented SMFD-ALD™, in a low cost system for R&D budgets. Sub-second ALD cycle times allow efficient and rapid exploration  of applications requiring thick films. Covering challenging patterned substrates such as advanced-generation DRAM device wafers, membranes, sensors, electron multipliers, etc. with aspect ratios up to 1,000.[/vc_column_text][/vc_column][vc_column width=”1/2″][vc_single_image image=”14340″ img_size=”medium” alignment=”center” qode_css_animation=””][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” css=”.vc_custom_1668164489213{padding-top: 20px !important;padding-bottom: 20px !important;}” z_index=””][vc_column width=”1/6″][button size=”large” style=”white” target=”_blank” hover_type=”default” font_weight=”500″ text_align=”center” text=”Contact us” background_color=”#707070″ border_radius=”6″ link=”https://www.stinstruments.com/contact/”][/vc_column][vc_column width=”1/6″ css=”.vc_custom_1451291568569{margin-right: 15px !important;}”][button size=”large” style=”white” target=”_self” hover_type=”default” font_weight=”500″ text_align=”center” text=”Request a brochure” background_color=”#eb6209″ border_radius=”6″ link=”https://www.stinstruments.com/vacuum-deposition/atomic-layer-deposition/request-brochure-theia/”][/vc_column][vc_column width=”1/6″][/vc_column][vc_column width=”1/6″][vc_column_text]
[/vc_column_text][/vc_column][vc_column width=”1/6″][/vc_column][vc_column width=”1/6″][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern”][vc_column width=”1/2″][vc_column_text css=”.vc_custom_1451314367818{padding-top: 30px !important;padding-right: 30px !important;padding-bottom: 20px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]

ICON-key-features-greyKey Features and Benefits

[/vc_column_text][vc_column_text css=”.vc_custom_1616417227587{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Field- upgradeable and scalable [/vc_column_text][vc_column_text css=”.vc_custom_1616070347555{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Better then 1% non-uniformity across wafer[/vc_column_text][vc_column_text css=”.vc_custom_1616417242908{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 30px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Ultra fast deposition (12-30 nm/min)                                                                                                                                                                                                                             [/vc_column_text][/vc_column][vc_column width=”1/2″][vc_column_text css=”.vc_custom_1451314569972{padding-top: 30px !important;padding-right: 30px !important;padding-bottom: 20px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]

ICON-key-features-greyApplications

[/vc_column_text][vc_column_text css=”.vc_custom_1616070401370{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Semiconductor (e.g. high k-dielectrics, metal-insulator-metal (MIM) film stacks, ultra-conformal SiO2 for trench isolation, ALD-Cap for chip passivation)[/vc_column_text][vc_column_text css=”.vc_custom_1616070417274{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Device fabrication[/vc_column_text][vc_column_text css=”.vc_custom_1616070436970{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 30px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Flat panel displays, glass and optics[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” el_class=”pg-sec-content-bd heading-cus-sec” z_index=””][vc_column width=”3/6″][vc_column_text]

About Forge Nano

[/vc_column_text][vc_column_text css=”.vc_custom_1609947153537{padding-top: 10px !important;}”]Global leaders in surface engineering and precision nano-coating technology, using Atomic Layer Deposition. Forge Nano’s proprietary technology and manufacturing processes make angstrom-thick coatings fast, affordable and commercially viable for a wide range of materials, applications and industries.[/vc_column_text][/vc_column][vc_column width=”1/6″][vc_column_text]

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Why Forge Nano?

[/vc_column_text][vc_column_text css=”.vc_custom_1621937320016{padding-top: 10px !important;}”]♦  Tools purpose built for performance, efficiency and throughput

♦  From lab scale to commercial scale

♦  In-house R&D department for system optimization[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” el_class=”cus-rel-prod-title” z_index=””][vc_column][vc_column_text]

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Superior coating performance and flexible configurations[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][vc_column width=”1/3″][vc_row_inner row_type=”row” type=”full_width” text_align=”left” css_animation=””][vc_column_inner width=”1/2″][vc_column_text]soft plasma etching[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/2″][vc_column_text css=”.vc_custom_1623334395664{padding-top: 20px !important;}”]NanoETCH

Dedicated soft-etching instrument[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][vc_column width=”1/3″ offset=”vc_hidden-lg vc_hidden-md vc_hidden-sm vc_hidden-xs”][/vc_column][/vc_row]