Chemical analysis

Chemical Analysis

Our chemical analysis instruments provide detailed chemical characterization reaching from atomic layers down to microns. These measurements provide a means to correlate performance with surfaces or thin film composition.

XPS

ELEMENTAL & CHEMICAL STATE INFORMATION

♦   Quantes / Combines conventional XPS with HAXPES for extended depth of analysis

♦   VersaProbe III XPS Scanning Microprobe / Multi-technique XPS including PHI’s patented X-ray beam induced secondary electron imaging.

♦   Quantera II XPS Scanning Microprobe / High throughput automated XPS with the highest small area sensitivity

♦   X-Tool Automated XPS Scanning Microprobe / Push button automated XPS

TOF-SIMS

ELEMENTAL, CHEMICAL & MOLECULAR STATE INFORMATION

♦   nanoTOF II TOF-SIMS / patented TRIFT mass spectrometer with superior sensitivity

Auger

ELEMENTAL STATE INFORMATION

710 Scanning Auger Nanoprobe groot♦  710 Scanning Auger Nanoprobe / High spatial resolution Auger imaging performance for the most demanding AES applications

Sub-micron IR spectroscopy

MOLECULAR & STRUCTURAL STATE INFORMATION

♦   mIRage / Submicron IR spectroscopy and imaging

RAMAN

MOLECULAR STATE INFORMATION

♦   RAMANforce / Renewed ultra-fast Raman imaging system with even higher spatial resolution near the diffraction limit

♦   RAMANdrive / Specialized Raman microscope for wafer analysis equipped with 300 mm stage

♦   RAMANview / New Raman imaging with a larger field of view, deeper depth of focus and a longer working distance