Microlenses play a key role in photonic and wafer-level optical devices, ensuring precise light control in applications such as communication, sensing, and imaging. Accurate form and surface characterization are essential to guarantee their optical performance.
Microlens arrays are commonly fabricated on silicon wafers using microfabrication techniques such as photoresist thermal reflow. In this process, patterned photoresist structures are heated until they form smooth, curved lenses. This approach is compatible with standard
semiconductor manufacturing and enables the production of uniform microlenses that meet the demanding optical requirements of modern photonic applications.
Learn More?
Please click on ‘Request Application Note’ and download the application note ‘High-precision optical metrology for Microlenses’.