The NX-Hivac is the most advanced high vacuum AFM for failure analysis and sensitive materials research. The NX-Hivac is a cutting-edge high vacuum AFM, designed to provide accurate performance for failure analysis on highly doped semiconductors. Using Park’s signature technology, the NX-Hivac is a true high vacuum AFM that can provide high-resolution, low-noise measurements that are repeatable and easy to acquire. This makes it the perfect choice for labs looking to increase their throughput and accuracy.


ICON-key-features-greyKey Features and Benefits

♦   High vacuum SSRM for improved sensitivity

♦   Easy tip exchange with signature Park technology

♦   Advanced StepScan automation and laser alignment for faster scanning


♦   High vacuum spreading resistance microscopy

♦   High vacuum scanning capacitance microscopy

♦   AFM measurement in oxygen free environment

About Park Systems

Playing a critical role in the development of AFM technology, Park Systems has remained the leading innovator in nanoscale microscopy and metrology throughout its long history and continues to invest in the development of new emerging technologies. With headquarters in Korea, the US, Japan, Singapore and Europe, they create some of the world’s most accurate and most effective AFMs for research and industry.

Why Park Systems?

♦   World-recognized leader in the AFM industry

♦   Unmatched ease of use

♦   The most innovative AFM technology

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