
Nanometer-scale morphology observation is critical due to the trend of decreasing feature sizes in semiconductor devices and the rapid development of advanced materials. In response to this, Hitachi High-Tech has developed the SU9600 SEM, which enables subnanometer observations.

♦ Unrivaled Resolution
♦ High Throughput
♦ Superior Stability
♦ Semiconductor industry
♦ Advanced materials research
♦ Nanotechnology
Hitachi High-Tech Corporation, provides a wide variety of scientific instruments. Their innovative R&D approach enables them to provide world-class solutions in the fields of materials sciences, life sciences, energy storage and semiconductor.
♦ Key player in the market of Electron Microscopes
♦ Creative, leading-edge technology
♦ Complementary product range
Compact variable-pressure SEM with unparalleled image resolution
Non-invasive measurement of micro- and nanogeometries with multiple optical technologies