APOLLO

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APOLLO – High throughput wafer coating

[/vc_column_text][vc_column_text]The Forge Nano Apollo ALD system is the benchmark tool in productivity and cost effectiveness. Due to the incorporation of the patented Synchronous Modulation of Flow and Draw (SMFD)-ALD feature, the Apollo system is the only system in the world that can run ALD cycles of less then 1 second, without compromising on the quality of the layer. In combination with the integrated cassette and robotic arm, the Apollo is the number one ALD tool for the production of wafer scaled ALD coatings.[/vc_column_text][/vc_column][vc_column width=”1/2″][vc_single_image image=”14930″ img_size=”medium” alignment=”center” qode_css_animation=””][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” css=”.vc_custom_1668164080667{padding-top: 20px !important;padding-bottom: 20px !important;}” z_index=””][vc_column width=”1/6″][button size=”large” style=”white” target=”_blank” hover_type=”default” font_weight=”500″ text_align=”center” text=”Contact us” background_color=”#707070″ border_radius=”6″ link=”https://www.stinstruments.com/contact/”][/vc_column][vc_column width=”1/6″ css=”.vc_custom_1451291568569{margin-right: 15px !important;}”][button size=”large” style=”white” target=”_self” hover_type=”default” font_weight=”500″ text_align=”center” text=”Request a brochure” background_color=”#eb6209″ border_radius=”6″ link=”https://www.stinstruments.com/vacuum-deposition/atomic-layer-deposition/request-brochure-apollo/”][/vc_column][vc_column width=”1/6″][/vc_column][vc_column width=”1/6″][vc_column_text]
[/vc_column_text][/vc_column][vc_column width=”1/6″][/vc_column][vc_column width=”1/6″][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern”][vc_column width=”1/2″][vc_column_text css=”.vc_custom_1451314367818{padding-top: 30px !important;padding-right: 30px !important;padding-bottom: 20px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]

ICON-key-features-greyKey Features and Benefits

[/vc_column_text][vc_column_text css=”.vc_custom_1616418812642{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Field- upgradeable and scalable[/vc_column_text][vc_column_text css=”.vc_custom_1616070347555{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Better then 1% non-uniformity across wafer[/vc_column_text][vc_column_text css=”.vc_custom_1616418827384{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 30px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Ultra fast deposition (12-30 nm/min)                                                                                                                                                                                                                             [/vc_column_text][/vc_column][vc_column width=”1/2″][vc_column_text css=”.vc_custom_1451314569972{padding-top: 30px !important;padding-right: 30px !important;padding-bottom: 20px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]

ICON-key-features-greyApplications

[/vc_column_text][vc_column_text css=”.vc_custom_1616070401370{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Semiconductor (e.g. high k-dielectrics, metal-insulator-metal (MIM) film stacks, ultra-conformal SiO2 for trench isolation, ALD-Cap for chip passivation)[/vc_column_text][vc_column_text css=”.vc_custom_1616070417274{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 10px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Device fabrication[/vc_column_text][vc_column_text css=”.vc_custom_1616070436970{padding-top: 10px !important;padding-right: 30px !important;padding-bottom: 30px !important;padding-left: 30px !important;background-color: #eaeaea !important;}”]♦   Flat panel displays, glass and optics[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” el_class=”pg-sec-content-bd heading-cus-sec” z_index=””][vc_column width=”3/6″][vc_column_text]

About Forge Nano

[/vc_column_text][vc_column_text css=”.vc_custom_1609947153537{padding-top: 10px !important;}”]Global leaders in surface engineering and precision nano-coating technology, using Atomic Layer Deposition. Forge Nano’s proprietary technology and manufacturing processes make angstrom-thick coatings fast, affordable and commercially viable for a wide range of materials, applications and industries.[/vc_column_text][/vc_column][vc_column width=”1/6″][vc_column_text]

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Why Forge Nano?

[/vc_column_text][vc_column_text css=”.vc_custom_1621937422072{padding-top: 10px !important;}”]♦  Tools purpose built for performance, efficiency and throughput

♦  From lab scale to commercial scale

♦  In-house R&D department for system optimization[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” el_class=”cus-rel-prod-title” z_index=””][vc_column][vc_column_text]

Product icon oranjeRelated products

[/vc_column_text][/vc_column][/vc_row][vc_row css_animation=”” row_type=”row” use_row_as_full_screen_section=”no” type=”grid” angled_section=”no” text_align=”left” background_image_as_pattern=”without_pattern” el_class=”prod-box cus-rel-prod” z_index=””][vc_column width=”1/3″][vc_row_inner row_type=”row” type=”full_width” text_align=”left” css_animation=””][vc_column_inner width=”1/2″][vc_column_text css=”.vc_custom_1616063654795{padding-top: 10px !important;}”][/vc_column_text][/vc_column_inner][vc_column_inner width=”1/2″][vc_column_text css=”.vc_custom_1623334474192{padding-top: 20px !important;}”]Minilab Platforms

Superior coating performance and flexible configurations[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][vc_column width=”1/3″][vc_row_inner row_type=”row” type=”full_width” text_align=”left” css_animation=””][vc_column_inner width=”1/2″][vc_column_text]soft plasma etching[/vc_column_text][/vc_column_inner][vc_column_inner width=”1/2″][vc_column_text css=”.vc_custom_1623334484721{padding-top: 20px !important;}”]NanoETCH

Dedicated soft-etching instrument[/vc_column_text][/vc_column_inner][/vc_row_inner][/vc_column][vc_column width=”1/3″ offset=”vc_hidden-lg vc_hidden-md vc_hidden-sm vc_hidden-xs”][/vc_column][/vc_row]