MiniLab 090 is a floor-standing tool for metal, dielectric and/or organics thin-film deposition. It contains a box-type stainless-steel process chamber with front door for loading/ unloading. The front door slides open on rails and with assistance from pneumatic locks, for easy in-glovebox operation. Also present is a rear door for service/maintenance access. The process chamber has a high aspect-ratio, ideal for long working distances for high uniformity coating via evaporative techniques. The MiniLab 090 is compatible with gloveboxes from most manufacturers. For integration, a suitable cutout is made in the glovebox rear wall for accepting the front face of the chamber.
Key Features and Benefits
♦ Glovebox compatible PVD system with sliding door on rails
♦ Substrate stages up to 11” diameter with optional rotation, heating, cooling, bias, Z-shift and source/substrate shutters
♦ Complementary techniques like etching, annealing and ion-beam sources
Techniques
♦ Magnetron Sputtering, E-Beam Evaporation, Thermal Evaporation and Low-Temperature Evaporation
♦ Metals, Dielectrics and organics deposition
♦ Automatic, manual, sequential and co-deposition
About Moorfield
Since 1989, Moorfield has specialized itself in vacuum deposition equipment (PVD/CVD) for pilot-scale industrial production and high-end educational institutions. Their system designs involve extensive modularity which results in flexible solutions. The product range, which consists of different functionalities, is sized for deposition of metals, inorganics and organics.
Why Moorfield?
♦ Excellence in vacuum technology since 1989
♦ Laboratory equipment to match your research
♦ needs
♦ Multiple platforms and infinite options
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