Groot-Ammers | January 17th, 2022

ST Instruments has the pleasure to invite you for the webinar ‘Optimizing Nanoscale Feature Analysis Using Modern AES Systems’ presented by Ashley Maloney, Ph.D., Staff Scientist at Physical Electronics.

DATE & TIME
📆 Thursday, February 10th, 2022 
🕔 17:00 (CET) 

As the development of new structures, materials and devices advance toward the nanoscale, the ability to characterize such small features is of increasing importance. Modern Auger Electron Spectroscopy instruments demonstrate an SEM spatial resolution of ~3-4 nm and an Auger spectroscopy spatial resolution of ~8 nm, putting AES at the forefront of surface analysis techniques with respect to spatial resolution at the nanoscale.

In this webinar, we will explore the optimization of beam conditions by examining the effects of beam size, energy, and scattering on nanofeature characterization using the latest PHI 710 Scanning Auger Nanoprobe.