Optical metrology solutions for next-generation semiconductors
Ultra high resolution SEM observation of DRAM capacitorsusing Cold Field Emission technology
Measuring Organic Light-Emitting Diodes (OLED) displayswith a F20-UV or F40-UV
High resolution imaging of plane surface of a 3D NAND Flash Memorywith the Regulus 8200 FE-SEM
Latent Images of Exposed EUV PhotoresistNanoscale chem. microscopy for studying the light-induced chemistry in photoresist
PAD surface monitoring in CMPSurface metrology
Correlate surface composition with device performance
Removal of hydrocarbon on SEM / TEM sample surfacesZONE Sample Cleaner