The Alphacen 300 Drive is an advanced atomic force microscopy (AFM) system engineered for 300 mm wafer metrology. Its precise tip-scanning platform delivers exceptionally low-noise, stable, and reproducible measurements. With WaveMode technology, the system achieves up to 15× faster line rates than conventional in-air AFM while preserving tip sharpness — enabling rapid, high-resolution analysis and consistent results, ensuring rigorous quality control in demanding semiconductor environments.
Key Features and Benefits
♦ Tip-Scanning Technology with Air Bearings
♦ WaveMode (Fast Off-Resonance Imaging)
♦ Advanced Automation & Ultra-Stable Stage
Applications
♦ Surface Roughness Metrology
♦ Wafer Edge and Sidewall Inspection
♦ Nanoelectrical and Dimensional Characterization of Semiconductor Devices
About Nanosurf
Nanosurf is a premier provider of atomic force microscopy systems, catering to the demands of scientific research, the nanotechnology industry, semiconductor production, and quality control. With a comprehensive product portfolio of AFM instruments, Nanosurf serves a diverse clientele across materials science, electronics development, life sciences, energy research, industrial QC and the semiconductor sector.
Why Nanosurf?
♦ Extreme User-Friendliness
♦ Modular & Future-Proof Platforms
♦ Innovative Proprietary Technologies
Related products
Measure roughness and other material properties of heavy and large samples up to 300 mm and 45 kg.
For unique requirements, we will design a bespoke AFM solution, leveraging our decades of engineering expertise