nanoPVD-T15A

nanoPVD-T15A – Thermal evaporation system for metals and organics

Model T15A is a thermal evaporation system designed for repeatable coating with organics and/or metals. At the heart of the system is a modular process chamber. The chamber is designed for easy disassembly for routine maintenance. At the rear of the vacuum chamber is a port for the pumping system. For organics, the system can be equipped with low-temperature evaporation (LTE) sources that offer control for temperatures ≤600 °C, ideal for working with low melting-point materials. For metals deposition, the unit is fitted with standard thermal evaporation sources. These are boxed sources that are capable of accepting industry-standard basket, wire or boat material supports.

ICON-key-features-greyKey Features and Benefits

♦   Up to 4 LTE sources for organics and up to 2 TE for metals

♦   High aspect ratio chamber for uniform deposition

♦   Numerous options available such as 500° sample heating, substrate rotation, substrate Z-shift and QCM sensor head

ICON-key-features-greyTechniques

♦   Metals and organics evaporation

♦   Quartz crystal sensor head for deposition rate and thickness monitoring

♦   Fundamental research, education  and product R&D

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About Moorfield

Since 1989, Moorfield has specialized itself in vacuum deposition equipment (PVD/CVD) for pilot-scale industrial production and high-end educational institutions. Their system designs involve extensive modularity which results in flexible solutions. The product range, which consists of different functionalities,

is sized for deposition of metals, inorganics and organics.

Moorfield

Why Moorfield?

♦   Excellence in vacuum technology since 1989

♦   Laboratory equipment to match your research
♦   
needs

♦   Multiple platforms and infinite options