MiniLab 030 is an ultra-compact floor-standing PVD system designed for high-quality thin film deposition of metals, dielectrics and organic materials. The system is glovebox compatible and features a standard turbomolecular pumping system, achieving high-vacuum base pressures better than 5 × 10⁻⁷ mbar. The MiniLab 030 supports a wide range of deposition techniques and can be configured to meet specific research requirements, applications and budgets. Industrial-grade PLC controls provide reliable operation via a user-friendly 7-inch touchscreen HMI or integrated PC.
Key Features and Benefits
♦ Ultra-compact front-loading design with a small footprint, making it ideal for research laboratories and R&D facilities where space is limited
♦ Configure the system for a wide range of thin film deposition applications with customizable sources, substrate handling and process controls to support evolving research projects
♦ Optional glovebox integration enables reliable deposition of air- and moisture-sensitive materials for advanced materials research
Techniques
♦ Magnetron Sputtering – High-quality thin film deposition for metals, dielectrics and advanced functional coatings
♦ Thermal & Low-Temperature (LTE) Evaporation – Precise deposition of organic materials and temperature-sensitive thin films
♦ Electron Beam (E-Beam) Evaporation – High-purity deposition of high-melting-point materials for optical, semiconductor and research applications
About Moorfield
Since 1989, Moorfield has specialized itself in vacuum deposition equipment (PVD/CVD) for pilot-scale industrial production and high-end educational institutions. Their system designs involve extensive modularity which results in flexible solutions. The product range, which consists of different functionalities, is sized for deposition of metals, inorganics and organics.
Why Moorfield?
♦ Excellence in vacuum technology since 1989
♦ Laboratory equipment to match your research
♦ needs
♦ Multiple platforms and infinite options
Related products
Dedicated soft-etching instrument
Glovebox Compatible
Compact benchtop high-performance, for thermal evaporation and magnetron sputtering